Session 2 – 29 April

Predictive maintenance for ASML’s DUV lithography systems

15:30 – 16:10

In the chip industry, time is money. Our customers expect ASML’s lithography systems to have high uptimes. But expected and unexpected maintenance is part of that equation, sometimes requiring to halt the production temporarily. In this talk, we show how ASML’s deep system knowledge is combined with advanced data science methodologies to predict necessary maintenance in advance. This is helping boost productivity, maximize system utilization and reduce unexpected workload for ASML customer support.

Anjan Gantapara works as a senior data scientist and architect in ASML’s Data Science and Engineering group. His work primarily focuses on creating machine learning solutions to challenges in EUV source diagnostics and predictive maintenance of DUV systems. Prior to ASML, he worked at Philips Research as a senior data scientist in the predictive maintenance projects for Philips imaging systems like MRI and CT systems. He has a PhD from Utrecht University in the field of statistical physics.

Anjan Gantapara 

Senior data scientist and architect at ASML